Level 2: Quantum Focus Instruments (QFI)
Equipped with VisNir-EMMI (Photoemission) / 1340nm XIVA / InfraScope Thermal Detection equipment.
Stage embraces multiple sensors & techniques on a single head – maximizes defect capture rates
Direct sensor-to-lens coupling of nir, visible, and mwir lenses to maximize fa throughput.
EMMI Failure Detection
XIVA Failure Detection
Thermal Overlay Failure Detection
1) Photoemission detects & localize gate leakage, dielectric breakdown, forward bias junction, oxide pinholes, and failures which result in electron-hole recombination.
2) XIVA™ LSIM locates shorts, junction defects, problem VIAs and other integrated circuit defects. XIVATM works by scanning a laser beam through a microscope lens while monitoring the device I/V response.
3) Thermal-Detection medium wave IR hot spot sensor locates ohmic faults from their self-heating. Heat radiates in the infrared spectral range and the Thermal sensors capture these radiant emissions.